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LEAFLET(PDF)
‘Specifications of ZnO substrates
@There are several directions for ZnO single crystals.
* Polar face (c-plane)
@The c-plane is available in both 10mm square wafers or 2-inch diameter
round wafers.
@There are two types of wafers with different resistivity available.
@The +c sector / 10`104[Άcm], The -c sector / 0.1`0.5[Άcm]
* Non-Polar faces (m-plane, a-plane)
@The m-plane is available in 10mm square wafers and itfs resistivity is same as the +c sector.
@Now we are also currently developing a 2-inch diameter round wafers sliced on the m-plane.
@We can also produce the a-plane (Size : 10mm~5mm).
* Semi-Polar faces (r-plane)
@We have recently started to produce the r-plane (Size : 10mm~5mm).
@Please do not hesitate to contact us about other directions available.@
* New line up!!
@We have developed a Low-Li Substrate (less than 0.01[ppm]) that is much
lower@than the Li concentration of existing substrates and a High Resistivity
Substrate that has 1.0E+10[Άcm] at room temperature.
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@Table of ZnO Specification
| Directions |
Size |
Thickness |
Notes |
c-cut plane
(0001) |
10mm ~ 10mm (}0.3mm) |
300`500um
(}10%) |
@ |
| m-cut plane (10-10) |
10mm ~ 10mm
(}0.3mm) |
300`500um
(}10%) |
@ |
| a-cut plane (11-20) |
10mm ~ 5mm
(}0.3mm) |
500um(}10%) |
Reference |
r-cut plane
(10-12) |
10mm ~ 5mm
(}0.3mm) |
500um(}10%) |
Reference |
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‘Substrate Data
The representative data of the c-plane are as follows.
Features of the substrates are high crystallinity (XRD), low Impurities, high transparency and flat surface morphology for epitaxy.
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| Features of TEW's ZnO substrates |
| @High Crystallinity |
FWHM of XRC(0002) / 18arcsec (typical) |
| @Low Impurities |
+c Sector / Li < 1ppm, Al < 0.2ppm, Fe < 0.01ppm
¦-c Sector / Al, Fe5ppm
Low-Li Substrate / Li0.01ppm |
| @Flat Surface |
RMS < 0.5nm (typical) |
| @Resistivity |
+c Sector / 10`104Άcm,
¦ -c Sector / 0.1`0.5Άcm (Both are n-type.) |
| @High Transparency |
90% (450`800nm) |
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