※ Various requirements are available upon request
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Item
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Specification
|
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Cutting angle accuracy (ZZ')
|
Specified cutting angle +/-5
|
|
Obliquity angle accuracy(XX')
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+/-10'
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Orientation flat accuracy
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+/-30'
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Final finish
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Polishing(both surface)
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Thickness accuracy
|
Specified thickness±25um
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Parallelism
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+/-20um
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